Abstract
Incorporation of nano-sized PbTiO 3 powders into PbTiO 3 carborylates were observed to significantly influence the ferroelectric and leakage properties of MOD- PbTiO 3 films. The deposition rate increases 4 times as much and the remanent polarization (P r ) increases 2 times as much due to the inclusion of nano-sized PbTiO 3 powders in the PbTiO 3 precursors. Furthermore, both the pyrolysis and post-annealing processes markedly influence the electrical properties of nano-powder incorporated PbTiO 3 films. The best properties obtainable are P r =12.6 μC/cm 2 , E c =359.4 kV/cm and J e ≦ 1×10 -5 A/cm 2 (at 100 kV/cm applied field) for the PbTiO 3 films pyrolyzed by rapid heating process and post-annealed at 625°C for 1 h. © 2001 Taylor & Francis.