Abstract
V-shaped beams are widely applied for the suspension of the sensors, fiber holders, and the suspension arms of atomic force microscopes. The performance of the V-shaped beam is highly dependent upon its initial out-of-plane deflection. This paper reports on the exploration of the out-of-plane deformation of V-shaped micromachined beams. A finite element model has been established to predict the deformation of a V-shaped micromachined beam. The fabrication and characterization of various shapes of SiO 2 V-shaped micromachined beams has been performed to observe the out-of-plane deformation caused by residual stress. With the difference between the analytical and experimental results, an etching process dependent mechanism has been discussed. Thus the design criteria to fabricate a flat V-shaped beam is accomplished.