Abstract
Magnetic induction heating is a promising heating approach for MEMS processes and devices. This study has discussed the scale effect of induction heating for thin-film microstructures through analytical and experimental means. The results show that the temperature increase varies with the in-plane surface area of the microstructure and the relative permeability of thin-film materials. Moreover, the shape of the microstructure also leads to the difference of temperature increase. In applications, localized heating and various temperature regions can be simultaneously achieved on the substrate by applying an external high-frequency magnetic field. © 2006 IOP Publishing Ltd.