Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2R Controller

Journal article

Chen-Fu Chien, Ying-Jen Chen, Chia-Yu Hsu and 宏鍇王

IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING,, Vol.11(2), pp.473-484

2014

Abstract

Advanced process control (APC);manufacturing intelligence;overlay errors;proportional-integral controller;run-to-run (R2R) control;yield enhancement

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Title: Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2R Controller
Creators - without role: Chen-Fu Chien
Ying-Jen Chen
Chia-Yu Hsu
宏鍇王
Publication Details: IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING,, Vol.11(2), pp.473-484
Grant note: 國科會
Identifiers: 9957767312206774
Academic Unit: Executive Cross-Discipline Master Program for Intelligent Manufacturing, Office of Academic Affairs, National Tsing Hua University
Language: English
Resource Type: Journal article