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Oxide-GaAs interfacial electronic properties characterized by modulation spectroscopy of photoreflectance
Journal article   Open access   Peer reviewed

Oxide-GaAs interfacial electronic properties characterized by modulation spectroscopy of photoreflectance

J.S. Hwang, Y.C. Wang, W.Y. Chou, S.L. Tyan, M. Hong, J.P. Mannaerts and J. Kwo
Journal of Applied Physics, Vol.83(5), pp.2857-2859
1998

Abstract

Built-in electric fields and interfacial state densities (D it ) in a series of oxide-GaAs heterostructures fabricated by in situ molecular beam epitaxy were studied using room temperature photoreflectance. The samples investigated were air-, Al 2 O 3 -Ga 2 O x -, and Ga 2 O 3 (Gd 2 O 3 )-GaAs. We found that the built-in electric fields are 48, 44, and 38 kV/cm for air-, Al 2 O 3 -, and Ga 2 O x -GaAs samples, respectively. For the Ga 2 O 3 (Gd 2 O 3 )-GaAs sample, the built-in electric field is negligibly small, indicating a very low interfacial state density. Estimated by the low field limit criterion, D it is less than 1 × 10 11 cm -2 eV -1 . Our results on the Ga 2 O 3 (Gd 2 O 3 )-GaAs sample are consistent with the data obtained previously using capacitance-voltage measurements in quasistatic/high frequency modes and photoluminescence measurements. © 1998 American Institute of Physics.
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