Abstract
A novel vapor-transport-assisted wet chemistry process was developed to fabricate oxide nanodot arrays from soft polymer templates. The feasibility and wide applicability of the proposed process was demonstrated with creation of high-density oxide nanodot arrays of TiO 2 , ZnO, and CO 3 O 4 . The present process not only avoids the over-growth problem inevitable in wet chemistry processes but also enables formation of oxide nanodots at low temperatures. The process can be readily extended to other compound systems in which the products can be formed through reactions of two reactants, one in liquid, phase and the other in vapor phase. © 2008 Materials Research Society.