- 題名
- Oxygen vacancy distribution and phase composition in scaled, Hf0.5Zr0.5O2-based ferroelectric capacitors
- 創作者：
- T. Iung - Centre National de la Recherche ScientifiqueL. Pérez Ramírez - Université Paris-SaclayA. Gloskovskii - Deutsches Elektronen-Synchrotron DESYChen-Yi Cho - National Yang Ming Chiao Tung UniversityM. Y. Lao - National Yang Ming Chiao Tung UniversitySourav De - National Yang Ming Chiao Tung UniversityT. H. Hou - National Yang Ming Chiao Tung UniversityC. Lubin - Centre National de la Recherche ScientifiqueM. Gros-Jean - STMicroelectronics (France)Nick Barrett - Centre National de la Recherche Scientifique
- 學術資源類型
- 期刊文章
- 出版日期
- 10/02/2025
- 出版資訊
- Applied physics letters, 卷.126(6)
- 語言
- 英語
期刊文章
Oxygen vacancy distribution and phase composition in scaled, Hf0.5Zr0.5O2-based ferroelectric capacitors
Applied physics letters, 卷.126(6)
10/02/2025
指標
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