- Title
- Partially Coherent Imaging in Two Dimensions and the Theoretical Limits of Projection Printing in Microfabrication
- Creators - without role
- 本堅 林
- Identifiers
- 9957771615306774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Journal article
- Publication Details
- IEEE Transactions on Electron Devices, Vol.ED-27, pp.931-938
Journal article
Partially Coherent Imaging in Two Dimensions and the Theoretical Limits of Projection Printing in Microfabrication
IEEE Transactions on Electron Devices, Vol.ED-27, pp.931-938
1980
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