摘要
The fabrication of polymer-reinforced, aligned multiwalled carbon nanotube composites into microelectromechanical system (MEMS) devices was discussed. Mechanical tests revealed an increase of the composite modulus by a factor of 20 compared with bare nanotubes. The damping and quality factors for nanotube MEMS devices were 12 and 0.042 at 1 atm, respectively, which are comparable with those of typical MEMS components. A nanotube-based microbeam was driven at lower pull-in voltage compared with metallic microbeams.