- Title
- Portable Conformable Mask -- A Hybrid Near-Ultraviolet and Deep Ultra- violet Patterning Technique
- Creators - without role
- 本堅 林
- Publication Details
- SPIE Proceedings, Vol.174, pp.114-121
- Identifiers
- 9957774142706774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Journal article
Journal article
Portable Conformable Mask -- A Hybrid Near-Ultraviolet and Deep Ultra- violet Patterning Technique
SPIE Proceedings, Vol.174, pp.114-121
1979
Related links
Metrics
1 Record Views