Abstract
Nanocomposites of benzoxazine-based polymers/polyhedral oligomeric silsesquioxane (POSS) have been prepared through copolymerization of furan-containing benzoxazine compounds and methylmethacrylate-POSS (MMA-POSS). Nanocomposites having MMA-POSS fractions of 0-70 wt% (POSS fractions of 0-28 wt%) are obtained. The high contents of MMA-POSS of the nanocomposites result in a reduction of their dielectric constants to 2.3. Moreover, some nanocomposites display POSS orientation into lamellar structures in nanometer sizes. The POSS orientation further reduces the dielectric constants of the nanocomposites to about 1.9. Hence, the prepared nanocomposites could be used as ultra-low-k materials for advanced microelectronics. © 2010 Elsevier Ltd.