Residual Stress and Thermal Effect of MEMS Pressure Sensor

Journal article

Tsung-Lin Chou, Chen-Hung Chu, Hsin-Nan Chiang and Kuo-Ning Chiang

Electronic Monthly Electronic Monthly, Vol.168, pp.150-167

2009

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Title: Residual Stress and Thermal Effect of MEMS Pressure Sensor
Creators - without role: Tsung-Lin Chou
Chen-Hung Chu
Hsin-Nan Chiang
Kuo-Ning Chiang - 國立清華大學工學院動力機械工程學系
Identifiers: 9957776677906774
Academic Unit: Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Journal article
Publication Details: Electronic Monthly Electronic Monthly, Vol.168, pp.150-167