- Title
- Resist Hardening Using a Conformable Mold
- Creators - without role
- 本堅 林
- Identifiers
- 9957774816806774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Journal article
Journal article
Resist Hardening Using a Conformable Mold
Journal of Vacuum Science & Technology, Vol.B4(1), p.426
1986
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