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Reversible and Precisely Controllable p/n-Type Doping of MoTe2 Transistors through Electrothermal Doping
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Reversible and Precisely Controllable p/n-Type Doping of MoTe2 Transistors through Electrothermal Doping

Yuan-Ming Chang, Shih-Hsien Yang, Che-Yi Lin, Chang-Hung Chen, Chen-Hsin Lien, Wen-Bin Jian, Keiji Ueno, Yuen-Wuu Suen, Kazuhito TsukagoshiYen-Fu Lin
Advanced Materials, 卷.30(13), 1706995
03/2018

摘要

2D electronics doping logic circuits MoTe2 transition metal dichalcogenide Materials Science (all) Mechanics of Materials Mechanical Engineering
Precisely controllable and reversible p/n-type electronic doping of molybdenum ditelluride (MoTe ) transistors is achieved by electrothermal doping (E-doping) processes. E-doping includes electrothermal annealing induced by an electric field in a vacuum chamber, which results in electron (n-type) doping and exposure to air, which induces hole (p-type) doping. The doping arises from the interaction between oxygen molecules or water vapor and defects of tellurium at the MoTe surface, and allows the accurate manipulation of p/n-type electrical doping of MoTe transistors. Because no dopant or special gas is used in the E-doping processes of MoTe , E-doping is a simple and efficient method. Moreover, through exact manipulation of p/n-type doping of MoTe transistors, quasi-complementary metal oxide semiconductor adaptive logic circuits, such as an inverter, not or gate, and not and gate, are successfully fabricated. The simple method, E-doping, adopted in obtaining p/n-type doping of MoTe transistors undoubtedly has provided an approach to create the electronic devices with desired performance.

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