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Secondary ion mass spectrometry to verify the implantation of magnetic ions in nanodiamonds
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Secondary ion mass spectrometry to verify the implantation of magnetic ions in nanodiamonds

Bo-Rong Lin, Chiung-Chi Wang, Chien-Hsu Chen, Srinivasu Kunuku, Tung-Yuan Hsiao, Hung-Kai Yu, Tzung-Yuang Chen, Yu-Jen Chang, Li-Chuan Liao, Chun-Hsiang Chang, …
Journal of Applied Physics, 卷.126(17), 5117342
11/2019

摘要

Physics and Astronomy (all)
Ion implantation is used to create nanodiamonds (NDs) with embedded magnetic ions for use in a wide range of biological and medical applications; however, the effectiveness of this process depends heavily on separating magnetic NDs from nonmagnetic ones. In this study, we use secondary ion mass spectrometry to verify the implantation of magnetic ions in NDs and the success of separation. When applied to a series of NDs with embedded iron or manganese ions, the sorting tool used in this study proved highly effective in selecting magnetic NDs. Besides, multienergy ion implantation and precise thickness control of NDs coating on the silicon wafer were suggested to improve this technology.

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