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Self-ordered InGaAs quantum dots grown at low growth rates
Journal article   Open access   Peer reviewed

Self-ordered InGaAs quantum dots grown at low growth rates

Chun-Yuan Huang, Meng-Chyi Wu, Jeng-Jung Shen and Shih-Yen Lin
Journal of Applied Physics, Vol.103(4), 044301
2008

Abstract

This study explores the effects of the growth rate on InGaAsGaAs quantum dots (QDs) in producing ordered QD arrays. Surface morphological observations reveal that the dot density decreases as the growth rate increases and the QDs can be gradually self-ordered in the [1 1- 0] direction. The threshold growth rate for one-dimensional self-ordered QD arrays is 0.054 μmh. This phenomenon is attributed to the preferential QD nucleation at the local strain maximum which is at the edge of the elongated step bunch. After the step bunches that elongated along [1 1- 0] become the main feature on the wetting layer surface, the accumulated strain field on both step edges favors the nucleation of QDs. However, the concurrent decrease in QD size and the thinning of the wetting layer may be associated with the desorption of In and Ga adatoms and the lateral mass transport, respectively. © 2008 American Institute of Physics.
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