Abstract
Microcantilever has been increasingly used as microsensor thanks to its fast response, low cost and parallel implementation in large quantity. The principle of sensing lies in the positive correlation between the resonant frequency of microcantilever and the target mass loading. The shape of cantilever determines the resonant frequency. Therefore it plays a vital role in microsensing. In the present study three basic geometric shapes (rectangle, triangle and half-ellipse) with innovative inner cut are investigated. The micro-cantilever beams are cut to external aspect ratios of 0.5, 1, and 2, and inner cut at aspect ratios of 0, 0.5, 1, and 2, with equal sensing area. Both numerical and experimental analysis indicates that the low-aspect-ratio cantilever with high-aspect-ratio inner cut achieved high sensitivity. The half-ellipse being the highest followed by the rectangle. The results are useful for optimal shape design of a micromechanical cantilever sensor. © 2012 Elsevier Ltd. All rights reserved.