Logo image
Silicon Wafers with Facet-Dependent Electrical Conductivity Properties
期刊文章   同儕審查

Silicon Wafers with Facet-Dependent Electrical Conductivity Properties

Chih-Shan Tan, Pei-Lun Hsieh, Lih-Juann ChenMichael H. Huang
Angewandte Chemie - International Edition, 卷.56(48), 頁碼.15339-15343
11/2017

摘要

band bending electrical conductivity facet-dependent properties field-effect transistors silicon Catalysis Chemistry (all)
By breaking intrinsic Si (100) and (111) wafers to expose sharp {111} and {112} facets, electrical conductivity measurements on single and different silicon crystal faces were performed through contacts with two tungsten probes. While Si {100} and {110} faces are barely conductive at low applied voltages, as expected, the Si {112} surface is highly conductive and Si {111} surface also shows good conductivity. Asymmetrical I–V curves have been recorded for the {111}/{112}, {111}/{110}, and {112}/{110} facet combinations because of different degrees of conduction band bending at these crystal surfaces presenting different barrier heights to current flow. In particular, the {111}/{110} and {112}/{110} facet combinations give I–V curves resembling those of p–n junctions, suggesting a novel field effect transistor design is possible capitalizing on the pronounced facet-dependent electrical conductivity properties of silicon.

相關連結

指標

1 檢視次數

詳細資料

Logo image