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Silicon-van der Waals heterointegration for CMOS-compatible logic-in-memory design
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Silicon-van der Waals heterointegration for CMOS-compatible logic-in-memory design

Mu-Pai Lee, Caifang Gao, Meng-Yu Tsai, Che-Yi Lin, Feng-Shou Yang, Hsin-Ya Sung, Chi Zhang, Wenwu Li, Jun Li, Jianhua Zhang, …
Science advances, 卷.9(49), 頁.eadk1597
12/2023
PMID: 38064557

摘要

Multidisciplinary
Silicon CMOS-based computing-in-memory encounters design and power challenges, especially in logic-in-memory scenarios requiring nonvolatility and reconfigurability. Here, we report a universal design for nonvolatile reconfigurable devices featuring a 2D/3D heterointegrated configuration. By leveraging the photo-controlled charge trapping/detrapping process and the partially top-gated energy band landscape, the van der Waals heterostacking achieves polarity storage and logic reconfigurable characteristics, respectively. Precise polarity tunability, logic nonvolatility, robustness against high temperature (at 85°C), and near-ideal subthreshold swing (80 mV dec-1) can be done. A comprehensive investigation of dynamic charge fluctuations provides a holistic understanding of the origins of nonvolatile reconfigurability (a trap level of 1013 cm-2 eV-1). Furthermore, we cascade such nonvolatile reconfigurable units into a monolithic circuit layer to demonstrate logic-in-memory computing possibilities, such as high-gain (65 at Vdd = 0.5 V) logic gates. This work provides an innovative 3D heterointegration prototype for future computing-in-memory hardware.

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