Abstract
Ferroelectric Pb(Zr,Ti)O 3 heterolayered films were prepared by the sol gel method. The adoption of PbZr 0.2 Ti 0.8 O 3 (or PbZr 0.2 Ti 0.8 O 3 /PbZr 0.8 Ti 0.2 O 3 ) buffer layers under a single-annealing process resulted in significant change in grain size, gradual change in composition, and Zr-rich regions in the middle of the heterolayered films. The large grain size and compatible interface between layers are good for the ferroelectric properties, and the Zr-rich layer contributes to not only the coercive field (E c ) lowering but also the improvement of fatigue endurance.