摘要
This work presents a special dual-electrode design in resistance temperature detector (RTD) that enables accurate temperature detection under mechanical strain. The proposed RTD contains two metallic materials (nickel and platinum), thus supports signal decoupling through different material characteristics of temperature coefficients of resistance and gauge factors. The RTD was patterned on a polyimide using standard photolithography and an additional protective polydimethylsiloxane was put atop to ensure structural integrity and environmental stability in operation. A comprehensive mathematical model was developed and validated through numerical evaluations for the proposed decoupling method and six RTD variants were investigated to understand geometric contribution on detection sensitivity. Experimental results confirmed that the dual-electrode RTD significantly suppressed strain-induced tolerance (to less than 2.0 degrees C), exhibiting an accuracy higher than 88.6%, which improved 82.8% compared to its conventional (single-electrode) counterpart.