Abstract
Lattice strain of epitaxially grown single crystal Fe 3 (Al,Si)/ GaAs films was measured in a synchrotron x-ray scattering experiment. The Fe 3 Al film (2.5% lattice mismatch) was partially strained and tetragonally distorted at room temperature. As the sample was annealed to 500°C, the internal strain was mostly relaxed while the tegragonal distortion was greatly reduced. We believe that the strain relaxation was caused by the interdiffusion of atoms through domain boundaries at elevated temperatures. In comparison, the Fe 3 Si film with much less lattice mismatch (0.17%) was completely strained up to 600°C without being relaxed.© 1996 American Institute of Physics.