Abstract
(AlCrMoTaTi)N coatings were deposited on Si substrates via reactive magnetron sputtering. The effects of N 2 -to-total (N 2 + Ar) flow ratio (R N ) on the coating structure and properties were examined. Alloy coatings have composite equiaxed grain structures consisting of amorphous and body-centered cubic crystal phases, whereas nitride coatings have columnar structures with single face-centered cubic crystal phase. Distinct lattice expansion and grain refinement were observed in nitride coatings as R N increased. Typical V-shaped columnar structures with faceted tops and open column boundaries transformed into denser and smaller columnar structures with domed surfaces. Increasing R N to 30% caused the hardness and modulus to reach maximum values of 30.6 and 291.6 GPa, respectively. Electrical resistivity increased from 536 μΩ cm to 8212 μΩ cm when R N increased from 10% to 50%. © 2013 Elsevier B.V. All rights reserved.