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Studies of interfacial roughness of GaAs/AlAs superlattices by grazing incidence x-ray scattering
Journal article   Peer reviewed

Studies of interfacial roughness of GaAs/AlAs superlattices by grazing incidence x-ray scattering

S. Huang, Z.H. Ming, Y.L. Soo, Y.H. Kao, T. Chang, L.P. Fu, G.D. Gilliland, J. Klem and M. Hafich
Modern Physics Letters B, Vol.11(24), pp.1057-1067
20/10/1997

Abstract

A series of type-II GaAs/AlAs superlattices epitaxially grown with different interrupts have been investigated using the techniques of grazing incidence X-ray scattering and diffraction. The interrupts are specifically designed to alter the interfacial roughness in the superlattices for the present study. Various structural parameters including the layer thickness, interfacial roughness, and intra-layer correlation lengths of fluctuations in the quantum-well widths have been determined. These results are compared with measurements made on the same set of samples using photoluminescence and optical imaging techniques.

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