Surface acoustic wave device on AlGaNGaN heterostructure using two-dimensional electron gas interdigital transducers

King-Yuen Wong; Wilson Tang; Kei May Lau; Kevin J. Chen

doi:10.1063/1.2742589

Surface acoustic wave device on AlGaNGaN heterostructure using two-dimensional electron gas interdigital transducers

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Surface acoustic wave device on AlGaNGaN heterostructure using two-dimensional electron gas interdigital transducers

King-Yuen Wong, Wilson Tang, Kei May Lau 和 Kevin J. Chen

Applied Physics Letters, 卷.90(21), 213506

2007

DOI: https://doi.org/10.1063/1.2742589

摘要

Physics and Astronomy (miscellaneous)

Surface acoustic wave (SAW) devices using two-dimensional electron gas (2DEG) as interdigital transducers (IDTs) on AlGaNGaN heterostructure has been demonstrated using a planar isolation technique based on the fluoride-based (C F4) plasma treatment technique. The rf characteristics of the SAW filters with planar 2DEG IDTs are compared with SAW devices that are made of metal IDTs or hybrid metal/2DEG IDTs. © 2007 American Institute of Physics.

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題名: Surface acoustic wave device on AlGaNGaN heterostructure using two-dimensional electron gas interdigital transducers
翻譯題名: Surface acoustic wave device on AlGaNGaN heterostructure using two-dimensional electron gas interdigital transducers
創作者：: King-Yuen Wong (作者) - Department of Electronic and Computer Engineering , Hong Kong University of Science and Technology
Wilson Tang (作者) - Department of Electronic and Computer Engineering , Hong Kong University of Science and Technology
Kei May Lau (作者) - Hong Kong University of Science and Technology
Kevin J. Chen (作者) - Hong Kong University of Science and Technology
學術資源類型: 期刊文章
出版日期: 2007
出版資訊: Applied Physics Letters, 卷.90(21), 213506
語言: 英語

Surface acoustic wave device on AlGaNGaN heterostructure using two-dimensional electron gas interdigital transducers

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