Abstract
A novel approach to incorporate organic moieties to silicon surface with the reaction of epoxide compounds with the silanol groups on silicon surface was investigated. Aniline moieties were covalently bound to silicon surface through a novel synthetic route. The aniline-terminated silicon was then linked to polyimide chains through polycondensation reactions. (100)-Oriented single-crystal silicon wafers, with a thickness of about 1.5 mm and a diameter of 150 mm, were purchased from Unisil Co. of Santa Clara, CA. The as-received wafers were polished on one side and doped lightly as n-type. A number-averaged molecular weight of 4700 g/mol and a polydispersity index of 1.70 were measured with the poly(amic acid). It was observed that amino-terminated silicon was capable of grafting with polyimide chains.