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Synthesis and characterization of self-catalyzed CuO nanorods on Cu/TaN/Si assembly using vacuum-arc Cu deposition and vapor-solid reaction
Journal article   Open access   Peer reviewed

Synthesis and characterization of self-catalyzed CuO nanorods on Cu/TaN/Si assembly using vacuum-arc Cu deposition and vapor-solid reaction

U.S. Chen, Y.L. Chueh, S.H. Lai, L.J. Chou and Han C. Shih
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol.24(1), pp.139-142
01/2006

Abstract

Large-area arrays of copper oxide (CuO) nanorods were self-catalyzed and selectively grown on a CuTaNSi assembly by combining vacuum-arc Cu deposition and vapor-solid reaction. X-ray-diffraction spectra showed the peaks of Cu films and CuO nanorods, respectively. Field-emission scanning electron microscopy images showed semialigned CuO nanorods with diameters of ∼40-80 nm. High-resolution transmission electron microscopy images showed the structure of individual CuO nanorods and their [111] growth direction. Auger electron spectroscopy depth profiles showed the elemental distribution of the CuOa-TaNSi assembly. X-ray photoelectron spectrometry identified the chemical nature of the CuO nanorods. Their electron field-emission properties are discussed from the current-density-voltage curves and Fowler-Nordheim plots. © 2006 American Vacuum Society.
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https://doi.org/10.1116/1.2151215View
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