摘要
In this study, a piezoelectric MEMS (Micro-Electro-Mechanical-System) speaker with thoughtfully selected resonant frequencies of dual cantilever units is designed and implemented. Based on the lead zirconium titanate (PZT) thin film with superior piezoelectric coefficient, the cantilever diaphragm is designed through the modal analysis. In the 1.5 mm by 1.5 mm cantilever array, a high-frequency actuation unit with resonance of 13.1 kHz and a low-frequency actuation unit with resonance of 6.35 kHz constitute the proposed piezoelectric MEMS speaker. The boost of sound pressure level (SPL) due to the resonant mode of low-frequency actuation unit reduces the total harmonic distortion (THD) around the subharmonic frequency of high-frequency actuation unit. Meanwhile, the asymmetric triangle diaphragm reduces the maximum stress in the structure when operating at the resonant frequency, thereby mitigating the THD spikes resulting from the nonlinear structural behavior. In pressure-field measurements, the proposed design can reach SPL ≥ 70.0 dB from 2.7 kHz to 15.0 kHz with only 0.179 V rms input. At the same time, THD remains below 3.0 % from 3.2 kHz to 20 kHz. The outstanding performance under larger input signal and bias voltage is also verified. Actuated by 0.354 V rms and 2 V DC bias, the maximum SPL achieves 111.9 dB and the SPL is higher than 80.0 dB from 3.3 kHz to 14.1 kHz. Furthermore, THD is lower than 3.0 % from 1.0 kHz to 8.9 kHz. A promising solution of piezoelectric MEMS speaker for in-ear applications is demonstrated in this study.