- Title
- The Applications of Cross-Sectional Transmission Electron Microscope Study of BF2+-Implanted (001)Si
- Creators - without role
- C.W. NiehL.J. Chen - 國立清華大學工學院材料科學工程學系
- Publication Details
- Proceedings of the National Science Council : Part A, Physical Science and Engineering Proceedings of the National Science Council : Part A, Physical Science and Engineering
- Identifiers
- 9957777155206774
- Academic Unit
- Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Journal article
Journal article
The Applications of Cross-Sectional Transmission Electron Microscope Study of BF2+-Implanted (001)Si
Proceedings of the National Science Council : Part A, Physical Science and Engineering Proceedings of the National Science Council : Part A, Physical Science and Engineering
1986
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