- Title
- The Optimum Numerical Aperture for Attenuated Phase-Shifting Masks
- Creators - without role
- 本堅 林
- Publication Details
- Microelectronic Engineering, Vol.17, p.79
- Identifiers
- 9957770052706774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Journal article
Journal article
The Optimum Numerical Aperture for Attenuated Phase-Shifting Masks
Microelectronic Engineering, Vol.17, p.79
1992
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