- Title
- The Optimum Numerical Aperture for Optical Projection Microlithography
- Creators - without role
- 本堅 林
- Identifiers
- 9957775465006774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Journal article
- Publication Details
- SPIE Proceedings, Vol.1463, p.42
Journal article
The Optimum Numerical Aperture for Optical Projection Microlithography
SPIE Proceedings, Vol.1463, p.42
1991
Related links
Metrics
1 Record Views