Abstract
The Mo layer was used as conducting back contact on a CIGS solar cell. Mo thin films were sputtering deposited on glass substrates. The morphology, stress, resistance and optical properties were measured by X-ray reflectivity, Xray diffraction and uv-vis spectrometer as functions of film thicknesses in this work. The Mo layers on the glass substrates exist some tensile stress of about 5~7 GPa. These tensile stresses make the Mo layers easy to peel off from the glass. The sheet resistance is larger than the inversed thickness law, which might due to a significant natural oxidation layer on the top surface and small grain sizes. With the higher series resistance of thinner Mo thin films, the concept of using double side CIGS solar cell is not feasible. © 2012 The Physical Society of the Republic of China.