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The growth of nano-scale diamond tips on diamond/Si
Journal article   Peer reviewed

The growth of nano-scale diamond tips on diamond/Si

Ya Ko Chih, Jennchang Hwang, Yu Lun Chueh, Li Jen Chou, An Pin Lee and Chwung Shan Kou
Journal of Crystal Growth, Vol.283(3-4), pp.367-372
01/10/2005

Abstract

A1. Nanostructures A3. Chemical vapor deposition processes B1. Diamond
We report the discovery of vertically aligned nano-scale diamond tips grown on the rugged polycrystalline diamond/Si substrates in a planar microwave plasma enhanced chemical vapor deposition system. The diamond nanotips exhibit three different morphologies (C-, cone-, and rod-like-shape) that can be monitored by varying substrate temperature and bias voltage. Experimental results indicate that the rod-like nanotips exhibit the best diamond quality, C-shape nanotips the second best, and the cone-shape nanotips the worst. © 2005 Elsevier B.V. All rights reserved.

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