The k3 coefficient in non-paraxial &#xf06c;&#x2f;NA scaling equations for resolution, depth-of-focus, and immersion lithography

Journal article

The k3 coefficient in non-paraxial /NA scaling equations for resolution, depth-of-focus, and immersion lithography

Journal of Microlithography Microfabrication and Microsystems, Vol.1, pp.7-12

2002

Optical lithography;immersion lithography;resolution scaling equation;DOF scaling equation

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Title: The k3 coefficient in non-paraxial /NA scaling equations for resolution, depth-of-focus, and immersion lithography
Creators - without role: 本堅林
Publication Details: Journal of Microlithography Microfabrication and Microsystems, Vol.1, pp.7-12
Identifiers: 9957771901406774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Journal article