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The /NA scaling equations for resolution and depth-of-focus
本堅 林
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SPIE Proceedings, Vol.4000, p.759
2000
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Abstract
Optical lithography;resolution scaling equation;DOF scaling equation
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Title
The /NA scaling equations for resolution and depth-of-focus
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本堅 林
Publication Details
SPIE Proceedings, Vol.4000, p.759
Identifiers
9957766930606774
Academic Unit
Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language
Traditional Chinese
Resource Type
Journal article
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