Logo image
Towards achieving a large-area and defect-free nano-line pattern via controlled self-assembly by sequential annealing
期刊文章   開放取用(OA)

Towards achieving a large-area and defect-free nano-line pattern via controlled self-assembly by sequential annealing

Tao Wen, Bo Ni, Yuchu Liu, Wei Zhang, Zi-Hao Guo, Yi-Chien Lee, Rong-Ming HoStephen Z.D. Cheng
Giant, 卷.8, 100078
12/2021

摘要

Giant surfactant Nano-patterning Self-assembly Thin film Chemistry (all) Materials Chemistry Polymers and Plastics Surfaces Coatings and Films
Utilizing the controlled self-assembling of a giant surfactant, a bottom-up method for constructing line gratings with sub-10 nm resolution has been developed. Via a simple solvent vapor annealing procedure, the giant surfactant comprised of an oligomeric silsesquioxane (DPOSS) and polystyrene (PS) tail (i.e., DPOSS-PS) has been precisely self-assembled into perpendicularly oriented lamellae structures. A follow-up thermal annealing further significantly promotes the long-range ordering, giving rise to highly oriented and defect-free sub-10 nm line patterns (up to areas of several µm 2 ). The solvent evaporation and thermal annealing process, together with the strong segregation strength (χN) of DPOSS-PS, play crucial roles in the self-orientation and width-reduction of the line patterns. This simple processing of the easy-accessed giant surfactants results in a facile and more economic approach for large-scale nano-sized line grating fabrication.

檔案與連結 (1)

url
https://doi.org/10.1016/j.giant.2021.100078檢視
已出版(紀錄版本) 開放

相關連結

指標

1 檢視次數

詳細資料

Logo image