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Transverse Mode Suppression in LNOI SH-SAW Resonators via Piston-Mode and Meshed Busbars
Journal article   Peer reviewed

Transverse Mode Suppression in LNOI SH-SAW Resonators via Piston-Mode and Meshed Busbars

Zhi-Qiang Lee, Yi-Cheng Liao, Ya-Ching Yu, Cheng-Chien Lin, Sung-Yuan Huang and Ming-Huang Li
IEEE microwave and wireless technology letters (Print), Vol.35(10), pp.1546-1549
01/10/2025

Abstract

Acoustics Admittance Filters Finite element analysis Lithium niobate meshed busbar piston mode Q-factor quality factor Resonators spurious mode Substrates surface acoustic wave Surface acoustic wave devices Surface acoustic waves Wireless communication
In this letter, we investigate the methods for suppressing transverse spurious modes in wideband shear-horizontal surface acoustic wave (SH-SAW) resonators by combining piston-mode operation with meshed busbar design to modify the velocity profile along the transverse direction and improve lateral energy confinement. The reported SH-SAW resonators, implemented on a thin-film lithium niobate on insulator (LNOI) platform, achieve a large effective electromechanical coupling coefficient ( k_(\text eff)²) of 35.3%, a high quality factor (Bode- Q_(\max)) exceeding 800, and a high admittance ratio (AR) of 75.3 dB at 791 MHz, yielding a high figure of merit (FoM = k_(\text eff)²⋅ Q_(\max)) of 283 while featuring a near spurious-free response. The proposed device is also compared with other reference designs implemented using conventional spurious mode suppression techniques on the same chip and demonstrates superior performance.

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