Abstract
The effects of object-to-image vibration are studied with the purpose to quantitatively define the maximum acceptable vibration level as a function of resolution, linewidth control, exposure and focus toterances, proximity condition, and illumination coherence. The exposuredefocus trees and windows of optically projected images are used to derive the vibration tolerance as well as the optimum exposure as a function of vibration amplitude. Normalized variables for resolution, focus, and exposure are used so that the results are universally applicable for any given diffraction-limited lens system. Time histograms are used instead of the frequency spectrum to unambiguously define a given vibration environment. The results are plotted in depth of focus as a function of the vibration amplitude. Resolution ranges from 0.48 to 1 .2 X/NA with the aperture ratio r = 0.4, 0.6, and 0.8. The optimum exposure for maximum depth of focus is similarly plotted.