Logo image
Wafer-scale MoS<inf>2</inf> thin layers prepared by MoO<inf>3</inf> sulfurization
Journal article   Peer reviewed

Wafer-scale MoS2 thin layers prepared by MoO3 sulfurization

Yu-Chuan Lin, Wenjing Zhang, Jing-Kai Huang, Keng-Ku Liu, Yi-Hsien Lee, Chi-Te Liang, Chih-Wei Chu and Lain-Jong Li
Nanoscale, Vol.4(20), pp.6637-6641
21/10/2012

Abstract

Atomically thin molybdenum disulfide (MoS2) layers have attracted great interest due to their direct-gap property and potential applications in optoelectronics and energy harvesting. Meanwhile, they are extremely bendable, promising for applications in flexible electronics. However, the synthetic approach to obtain large-area MoS2 atomic thin layers is still lacking. Here we report that wafer-scale MoS2 thin layers can be obtained using MoO3 thin films as a starting material followed by a two-step thermal process, reduction of MoO3 at 500 °C in hydrogen and sulfurization at 1000 °C in the presence of sulfur. Spectroscopic, optical and electrical characterizations reveal that these films are polycrystalline and with semiconductor properties. The obtained MoS 2 films are uniform in thickness and easily transferable to arbitrary substrates, which make such films suitable for flexible electronics or optoelectronics. © 2012 The Royal Society of Chemistry.

Metrics

1 Record Views

Details

Logo image