摘要
Microscopy using the soft X-ray as an illumination source can integrate spectroscopy into images. This capability was implemented at Taiwan Light Source (TLS) in the early 2000s through two photoelectron-based microscopy stations whose imaging optics is either zone-plate (TLS 09A1) or electron lens (TLS 05B2). The microscopy project was later expanded into multiple stations and beamlines at Taiwan Photon Source (TPS) to take advantage of TPS's low emittance. In this report, we summarize the activities of soft X-ray microscopy at TLS, followed by the status of microscopy stations under construction at beamline TPS 27A and 39A. The new lineup at TPS is to meet the scientific challenges ahead while carrying the existing activities forward. Both photoemission and transmission X-ray microscopy will be available at TPS.