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X-ray-induced Cu deposition and patterning on insulators at room temperature
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X-ray-induced Cu deposition and patterning on insulators at room temperature

Pei-Cheng Hsu, Yu-Sheng Chen, Yeukuang Hwu, J.H. Je, G. MargaritondoEng Soon Tok
Journal of Synchrotron Radiation, 卷.22, 頁碼.1524-1527
2015

摘要

copper seed layer electroless plating micro-patterning X-ray synthesis Radiation Nuclear and High Energy Physics Instrumentation
X-ray irradiation is shown to trigger the deposition of Cu from solution, at room temperature, on a wide variety of insulating substrates: glass, passivated Si, TiN/Ti/SiO2/Si and photoresists like PMMA and SU-8. The process is suitable for patterning and the products can be used as seeds for electroplating of thicker overlayers.

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https://doi.org/10.1107/S1600577515015234檢視
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