Abstract
High T c superconducting Y-Ba-Cu-O films have been produced by rf magnetron sputtering using single unreacted composite targets of Y 2 O 3 , BaF 2 , and CuO powders. Transport measurements of the films showed a sharp resistive T c (R=0) at 89 K and a metallic behavior of resistivity versus temperature. The films show preferred orientations when deposited on single-crystal SrTiO 3 substrates (100) or (110) and followed by a post O 2 annealing at 825 °C.