摘要
A spin-coated sol-gel method for the fabrication of highly porous or smooth ultra-thin ZrO 2 films was developed. By spin-coating sol solutions, which contained ZrCl 4 in anhydrous isopropanol, on substrates, the morphology and thickness of thin films were easily controlled by changing the concentrations of ZrCl 4 in sol solutions. A highly porous film with large specific surface area (180 m 2 /g) was obtained at 150 g ZrCl 4 /l without the addition of templates. When the concentration of ZrCl 4 decreased to 17 g/l, the porous surface turned into a smooth thin film. A linear relationship between film thicknesses and concentrations of ZrCl 4 ranging from 17 to 3 g ZrCl 4 /l was observed, and an ultra-thin film with the thickness of 1.8 nm was achieved when 3 g ZrCl 4 /l was used. Results obtained in this study clearly show that spin coating of anhydrous sol solution is an efficient method for the fabrication of ZrO 2 films with controllable morphology and thickness. © 2005 Elsevier B.V. All rights reserved.