- Title
- 原子力顯微鏡微影技術與應用
- Creators - without role
- 世森 簡尚志 果 - 國立清華大學理學院物理學系
- Identifiers
- 9957773169406774
- Academic Unit
- Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Journal article
- Publication Details
- 科儀新知, Vol.21(5), p.44
Journal article
原子力顯微鏡微影技術與應用
科儀新知, Vol.21(5), p.44
2000
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