- Title
- 應用於大面積微波電漿源之輻射共振腔原理探討
- Creators - without role
- 健倫 洪存續 張 - 國立清華大學理學院物理學系國瑞 朱涪 戴康威 呂
- Publication Details
- 真空科技, Vol.13(3), pp.55-61
- Identifiers
- 9957775885006774
- Academic Unit
- Department of Physics, College of Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Journal article
Journal article
應用於大面積微波電漿源之輻射共振腔原理探討
真空科技, Vol.13(3), pp.55-61
2000
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