- Title
- 矽之奈米級蝕刻
- Creators - without role
- 尚志 果 - 國立清華大學理學院物理學系
- Publication Details
- 自然科學簡訊, Vol.12(1), p.20
- Identifiers
- 9957771116506774
- Academic Unit
- Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Journal article
Journal article
矽之奈米級蝕刻
自然科學簡訊, Vol.12(1), p.20
2000
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