- Title
- 積體電路用無電鍍銅導線
- Creators - without role
- 樹均 林均蔚 葉宏輝 許守一 張 - 國立清華大學工學院材料科學工程學系
- Publication Details
- 材料會訊 材料會訊, Vol.10(4), pp.9-23
- Identifiers
- 9957766836806774
- Academic Unit
- Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Journal article
Journal article
積體電路用無電鍍銅導線
材料會訊 材料會訊, Vol.10(4), pp.9-23
2003
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