Abstract
In this article, method of finishing lens' shape using micro-energy beam after polishing process is proposed to achieve high quality lens. The project aims to design a dielectric barrier discharge (DBD)-based micro-energy jet, of which jet is an atmospheric plasma jet configured from a double tube with fine focused plasma for local polishing. In this study, the etching performance and main characteristics of this jet tool are discussed in the context that the plasma light intensity from highly reactive fluorine atoms and other radicals can be well defined using optical emission spectrometry. The results reveal that the etching rate can achieve 50 nm/min to 450 nm/min and surface roughness (Ra) remain lower than 5 nm after plasma treatment.