Abstract
The ternary phase diagram of the Al-Ga-Sb system was established in the Ga-rich region. Liquidus isotherms at 400, 450, 500, and 500 degree C and solidus isotherms at 500 and 550 degree C were determined experimentally. Under the assumptions that the ternary liquid is a simple solution and that the AlSb-GaSb solid forms an ideal solution, excellent agreement was obtained between the calculated liquidus and solidus isotherms and experiment. The compositional variation of the Al//xGa//1// minus //xSb epitaxial layers during growth was delineated.