Abstract
In the last few years, the Run-to-Run (RtR) control based on Exponentially Weighted Moving Average (EWMA) or Double Exponentially Weighted Moving Average (DEWMA) controller have gained popularity in the manufacturing of semiconductors. The RtR controllers are designed to be robust with respect to model mismatch, uncertainties and delay problem. In this thesis we proposed a RtR unified predictive control (RtR-UPC) framework by using polynomial approach. A theoretical analysis of RtR-UPC properties based on discrete control theory is also provided. Based on some specified parameters settings, the RtR-UPC controller can be stated as a generalized case of EWMA and DEWMA schemes. Furthermore, the completely robust stability and performance analysis with and without delay problem of RtR-UPC is discussed. Also, we utilize this RtR-UPC scheme to derive the closed-loop response of process under six-typical stochastic disturbances (White Noise, RW, ARMA(1,1), IMA(1,1), DT and RWD) and to examine the performance of RtR-UPC. The asymptotic mean, asymptotic variance (AVAR) and the asymptotic mean square error (AMSE) are used to be the reference performance indices. For these specified stochastic disturbances, the corresponding optimal weights which minimize a process output AMSE of the process with and without delay are also discussed. Finally, we proposed a switching mechanism to integrate the transient and steady-state performance results. Through the switching with runs, the compromise total performance can be achieved. Some simulation results are given in the end of this thesis to show a property of RtR-UPC scheme.